Chemical Supply Systems
Chemical Support Systems PURAS®
PURAS® chemical supply systems provide safe and efficient chemical handling, optimize processes, enhance workplace safety, and minimize the risk of accidents.
PURAS® Process Systems for safe chemical management
PURAS® Chemical Supply Systems from Fäth ensure the safe storage, supply, dosing, mixing and disposal of process chemicals for industrial manufacturing processes. The systems are used in the semiconductor, pharmaceutical and chemical industries, as well as in other high-tech applications.
From compact chemical supply systems to redundant changeover tank systems, chemical dosing systems, chemical mixing systems, slurry supply systems and solutions for acid supply in cleanrooms, we develop systems precisely tailored to your processes. Engineering, manufacturing, testing, qualification and service are all provided from a single source.
Why choose PURAS® Chemical supply systems?
Maximum supply reliability
Our chemical supply systems ensure a continuous supply to your production equipment. Redundant changeover tank systems prevent process interruptions and increase system availability.
Precise chemical dosing
The integrated chemical dosing systems enable precise and reproducible dosing of every process chemical. This reduces chemical consumption, rejects and operating costs.
Maximum safety
All chemical supply systems are equipped with comprehensive safety features, including leak detection, negative-pressure monitoring, exhaust-air monitoring and containment systems.
Intelligent monitoring
Sensors, alarm functions and emergency shutdown systems continuously monitor pressure, temperature, fill levels and leaks. Deviations are detected at an early stage, helping to prevent production downtime.
Our Chemical supply systems
The PURAS® product family includes a range of chemical supply systems, chemical mixing systems and chemical dosing systems for virtually every process requirement—from supplying individual chemicals to their safe disposal.
PURAS® 200 Simplex
Single changeover tank system
Supplies one process chemical without redundancy. A compact solution for applications with standard availability requirements, ensuring a safe and reliable chemical supply.
PURAS® 200 Duplex
Dual changeover tank system
Supplies one process chemical from two containers. When one container is empty, the system automatically switches to the second, ensuring an uninterrupted supply and increased system availability.
PURAS® 200 Maxim
Changeover fixed-tank system
For maximum process safety: The changeover tank system ensures a continuous, bubble-free chemical supply with maximum availability—ideal for critical production processes, such as those in the semiconductor industry.
PURAS® 200 Mixtura
Mixing tank system
Automatically prepares diluted chemicals from concentrates, such as hydrofluoric acid. Precise dosing and reproducible mixing ratios ensure consistent chemical quality.
PURAS® 200 Locus
Disposal System
A system for the safe collection of liquid chemical waste. Drums or tanks are securely contained and stored until disposal, ensuring safe chemical waste management.
PURAS® Locus 1000
A system for the safe collection and handling of chemical waste. Drums or tanks are securely contained and stored until disposal, ensuring closed and safe chemical waste management.
Contact
Contact us
Are you planning a new chemical supply system or looking to modernise an existing installation? Our experts will be happy to advise you on system design, safety concepts and the right PURAS® solution for your application from your initial enquiry through to commissioning.
Contact us for a no-obligation consultation. Together, we will develop the right solution for your process chemical supply requirements.
- Fäth GmbH · Schwabacher Str. 10 · 01665 Klipphausen
- +49 35204 3930-50
- info@faeth.com
Our product data sheets
PURAS® 1000 Chemical support systems
PDF – 589KB
PURAS® 200 Chemical support systems
PDF – 567KB
PURAS® 200 Chemical Support Systems
Industries
Industry solutions for safe chemical supply
PURAS® Chemical Support Systems are designed for industrial applications in which process chemicals must be supplied, dosed, mixed or disposed of safely and under controlled conditions. Thanks to their modular design, they are suitable for a wide range of processes in the semiconductor, life sciences, chemical and manufacturing industries.
01
Semiconductor Industry
In the semiconductor industry, PURAS® Chemical Supply Systems ensure the safe and continuous supply of process chemicals for wet processes, etching systems, cleaning processes and wafer manufacturing. The focus is on meeting stringent purity requirements, maximising system availability and ensuring a reliable chemical supply.
02
Pharmaceuticals / Life Sciences
For pharmaceutical and life sciences applications, PURAS® ensures the safe supply, dosing and distribution of process chemicals under GMP-compliant conditions. The systems can be individually qualified and support a reproducible and fully documented chemical supply in laboratories and production areas.
03
Chemical Industry
In the chemical industry, PURAS® Chemical Supply Systems ensure the safe storage, dosing and supply of acids, alkalis, solvents and other process chemicals. Robust safety features and high system availability support safe and cost-effective production operations.
04
Research & Development
Research and development facilities benefit from flexible chemical supply systems for changing processes and experimental setups. The modular design allows easy adaptation to new chemicals, laboratory applications and pilot plants.
05
General industry
Outside highly regulated industries, PURAS® Chemical Supply Systems are used wherever process chemicals need to be stored, dosed or supplied safely. The systems can be individually tailored to specific production processes and operational requirements.
06
PCB Manufacturing / Electroplating
For PCB manufacturing and electroplating applications, PURAS® ensures the precise supply of process baths, acids, alkalis and other chemicals. Accurate chemical dosing and a reliable chemical supply help maintain consistent process quality and a high level of production safety.
Frequently asked questions
PURAS® Chemical supply systems – Your questions answered
Which process chemicals is PURAS® suitable for?
PURAS® Chemical Supply Systems are suitable for a wide range of process chemicals, including acids, alkalis, solvents and ultra-pure chemicals. Typical chemicals include HF, HCl, H₂SO₄, NH₄OH, KOH and HNO₃, as well as other chemicals used in the semiconductor, pharmaceutical, chemical and manufacturing industries.
Can aggressive acids and alkalis also be supplied safely?
Yes. PURAS® systems can be designed for the safe supply of aggressive chemicals such as hydrofluoric acid, hydrochloric acid, sulphuric acid, nitric acid, potassium hydroxide and ammonium hydroxide. Depending on the chemical, its concentration and the process requirements, the materials, sensors, safety equipment and piping components are adapted accordingly.
Which solution is right for my application?
PURAS® offers the right chemical supply system for every requirement: Simplex for supplying a single chemical without redundancy; Duplex with two containers for increased availability; Maxim as a fixed-tank changeover system for a continuous, bubble-free supply; Mixtura for preparing diluted chemicals from concentrates; and Locus for the safe disposal of chemical waste.
Which safety features are included?
PURAS® systems are equipped with comprehensive safety features as standard, including spill containment trays, leak sensors, door monitoring, exhaust-air monitoring and negative-pressure monitoring. Alarms and safety functions detect leaks as well as pressure or temperature deviations at an early stage, helping to ensure safe system operation.
Can Fäth provide commissioning and qualification services?
Yes. As standard, the PURAS® system is packaged and delivered ex works. Optionally, Fäth can provide on-site installation, commissioning, qualification, training, remote access and additional services offering engineering, manufacturing, testing and qualification from a single source.
Can chemical supply systems be customised?
Yes. All PURAS® Chemical Supply Systems can be customised to meet specific customer requirements. This includes sensors, automation, piping materials, documentation, and SEMI- or GMP-compliant designs.
Can chemicals be mixed or diluted?
Yes. PURAS® Mixtura is an automated chemical mixing system that precisely dilutes concentrates and ensures reproducible mixing ratios.
How quickly is a PURAS® system available?
Thanks to the standardised PURAS® platform, our systems are generally available up to 20% faster than comparable custom-built systems. Before delivery, each system undergoes a Factory Acceptance Test (FAT).
Are PURAS® systems also suitable for slurry or ultra-pure chemicals?
Yes. In addition to conventional process process chemicals, PURAS® systems can also be designed for ultra-pure chemicals and specialised media. For slurry applications applications, Fäth offers complementary solutions for slurry supply, media distribution and process integration.
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