Recycling systems for the recovery of slurry,
water, and valuable raw materials.
Fäth Group was the world’s first company to develop a patented recycling plant enabling the recovery of ultrapure water and chemical raw materials through an ultrafiltration process. A mixture of wastewater and chemicals is fed into the recycling system. Through several complex filtration and ultrafiltration stages, the mixture is separated, allowing both water and chemicals to be reintroduced into the production process. This innovative process is both environmentally friendly and trendsetting within the semiconductor industry.
Recycling Modul
| HighQ® Compact Modul | 1.0 – 2.4 m³/h |
| HighQ® Recycling Modul 2 UF | 2.4 m³/h |
| HighQ® Recycling Modul 4 UF | 5.6 m³/h |
| HighQ® Recycling Modul 6 UF | 8.4 m³/h |
| HighQ® Recycling Modul 8 UF | 12 m³/h |
Peripherie modul
| HighQ® pre- and fine filter module | |
| HighQ® Mix & Transfer Modul | |
| HighQ® Wastewater Buffer Tank | |
| HighQ® Permeate Tank | |
| HighQ® Recirculation Tank | |
| HighQ® Analyse Modul | |
| PURAS® Original Slurry Supply System | |
| PURAS® Chemical Supply Module | |
Process Overview: HighQ® Slurry Recycling Systems
Re-use Quality Improvement
The patented recycling plant offers the opportunity to recover and re-use the utilised materials. Resources are thus completely exploited. The quality standards of the chemical raw materials are maintained by the recycling process.
Resource-efficient by Recycling Quota
The re-use of chemical raw materials and process water (permeate) results in significant savings in the production process. With a recycling rate of up to 65%, only 35% of new raw materials need to be added. This significantly reduces the need for raw materials.
Protection of Water Resources
This recycling plant offers an important contribution to protecting the environment. Harmful nanoparticles are filtered out of the wastewater and this provides a better water quality. The reduced consumption of non-renewable raw materials saves important and valuable resources.
Cost Savings due to Backflushing Processes
The patented and self-cleaning backwashing process of the ultrafiltration modules leads to a significantly longer lifetime of the very cost-intensive filter elements. This pushes the cost efficiency of the entire system.
More Interesting Topics
Membrane pilot plant
Compact membrane pilot plant for microfiltration in cross-flow operation. Ideal for trials, scale-up and membrane evaluation under real conditions.
Production membrane plant outside/in:
Sustainable treatment of even complex grinding wastewater – state-of-the-art membrane technology saves fresh water and ensures stable filtrate quality.
Chemical Support Systems PURAS®
PURAS® chemical supply systems provide safe and efficient chemical handling, optimize processes, enhance workplace safety, and minimize the risk of accidents.