10.–13. November 2026 · München
Fäth Group at SEMICON Europa 2026
Meet us at SEMICON Europa in Munich from November 10-13, 2026, in Hall B1, Booth 265. Schedule your personal meeting with our experts today!
High-Purity solutions for semiconductor facilities
System solutions for High-Purity media supply and wastewater recycling
From the safe supply of process chemicals and gases to the recovery and recycling of water and process media, Fäth develops integrated system solutions for demanding semiconductor manufacturing processes. Tailored to your requirements and delivered from a single source, our solutions ensure efficiency, reliability, and sustainability throughout the production cycle.
PURAS® – Safe Chemical supply
PURAS® systems provide reliable and demand-driven chemical supply solutions for demanding semiconductor manufacturing processes. From compact supply units and dosing systems to blending skids and fully redundant installations, we design and build systems tailored to your specific process and safety requirements. Our solutions ensure maximum process reliability, operational safety, and seamless integration into your production environment.
AERION® – Safe Gas supply
AERION® systems provide a safe and reliable supply of process gases for demanding semiconductor manufacturing applications. From valve manifold boxes and gas cabinets to fully automated distribution systems, we develop customized solutions tailored to your process, purity, and safety requirements. Our systems ensure maximum operational safety, process stability, and compliance with the highest industry standards.
Slurry & wastewater recycling
Our recycling solutions separate water and process media through multi-stage filtration and ultrafiltration processes. This enables the recovery and treatment of high-purity water and valuable resources for reuse in the production cycle. The result is a more efficient, sustainable, and resource-conscious fab operation with reduced water consumption and lower operating costs.
Why Fäth?
Your Partner for Safe and Reliable Fab Operations
01
System expertise from a single source
Von Engineering und Konstruktion über Fertigung und Montage bis zu Prüfung, Qualifizierung und Service: Fäth begleitet Projekte ganzheitlich. Das reduziert Schnittstellen und ermöglicht optimal aufeinander abgestimmte Systemlösungen für Ihre Fab.
02
Experience with Demanding Process Media
Chemikalien, Prozessgase, Slurry und Abwasser stellen hohe Anforderungen an Sicherheit, Werkstoffe und Anlagenkonzepte. Fäth verbindet langjährige Erfahrung in der Reinstmedienversorgung mit umfassender Kompetenz im Anlagen- und Rohrleitungsbau.
03
International presence
With facilities in Germany, Malaysia, Singapore, and China, Fäth supports customers worldwide in the execution of semiconductor infrastructure projects. Our international presence enables us to deliver local expertise, efficient project management, and responsive service in key semiconductor markets. From engineering and implementation to commissioning and after-sales support, we provide reliable assistance throughout the entire project lifecycle.
