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Individual Parts / Components

Are you looking for a reliable, quality-focused partner for manufacturing individual parts and components? The Fäth Group has established itself as a reliable OEM partner and provider for design and prototype development, right up to individual volume production for leading system manufacturers in the semiconductor industry.

Overview of our products and services:

  • Custom module construction based on
    • Manufacturing drawings
    • Electrical circuit diagrams
    • P&IDs (flow charts)
    • Parts lists for components and assemblies
  • Module configuration via components and assemblies
  • SEMI certification by third parties (SALUS/TÜV)

Process chamber

Process chamber holder


Nozzle pick-up

Rotary plate

Rotary table

Central nozzle pick-up

Design component

Drip tray

Turntable large PEEK

Turntable PEEK

Turntable POM

Test rod

Sensor housing