We close the gaps in your process environment by producing individual modules. Based on your plans, we produce a tailored housing and equip it with technical components. That allows you to supplement your own planning and installation resources specifically with Fäth Group products and services. If required, we are also happy to provide you with a complete package including planning and seamless integration of the module in your plants.
Supply module
When developing and building this module, customer-specific space and feature requirements must be considered. The module was also optimised in terms of process technology and installation as part of the development process.
The redundant structure for pumps and filters increased the supply reliability increased. We also succeeded in improving the user friendliness in continuous operation and in the event of maintenance. The operator was involved in the design process from the outset.
An IBC with a volume of 1,000 litres was integrated in this module. However, other sizes from small 5 litre units to large tank systems are also conceivable.
Overview of other properties:
- Use of GEMÜ, Entegris and Swagelok components that have proven themselves in the semiconductor industry
- Flexible programming and communication with superordinate control system
- Safety devices ensure personnel safety
- Outstanding purity
- Commissioning and training on the system itself
- CE Declaration of Conformity
- Supply system from supply and distributor to the hook-up in high-purity design
Solvent system
This solvent system is designed in accordance with the ATEX directive and is suitable for installation in zones 1 and 2. It has a stainless steel housing with a collection tray and meets strictest requirements in terms of supply security and purity. German supervisory body TÜV approves the plant on-site in Klipphausen.
If required, we can integrate a control system in the solvent system in accordance with the customer’s requirements, to monitor parameters like pressure, temperature, flow rate, valve strokes, pump strokes and leaks.
Overview of other properties:
- Use of GEMÜ, Entegris and Swagelok components that have proven themselves in the semiconductor industry
- Flexible programming and communication with superordinate control system
- Safety devices ensure personnel safety
- Outstanding purity
- Commissioning and training on the system itself
- CE Declaration of Conformity
- Supply system from supply and distributor to the hook-up in high purity
Mixing systems
Our mixing systems can meter wet chemicals/slurry with utmost precision via weighing scales or to flow fittings. Concentration and process reliability can be monitored dependably via the integrated analysis system. Customers can decide whether to chose semi- or fully automatic operation with a batch mode. The module includes a mixing tank, a day tank and a supply line. The system can also optionally be designed as a loop system.
Overview of other properties:
- Use of GEMÜ, Entegris and Swagelok components that have proven themselves in the semiconductor industry
- Flexible programming and communication with superordinate control system
- Safety devices ensure personnel safety
- Outstanding purity
- Commissioning and training on the system itself
- CE Declaration of Conformity
- Supply system from supply and distributor to the hook-up in high purity
