Gas cabinet
Your partner for efficient, high-purity gas cabinets
Rely on Fäth gas cabinets for a gas supply in your company, being safe and cost-efficient.
- Überblick
- Anwendungsbereich
- Technische Daten
Fäth gas cabinets ensure the optimal gas supply
Fäth Group offers high quality ultra high purity (UHP) gas supply systems in the design of a gas cabinet. Our gas cabinets are designed for loading single or double gas cylinders, guaranteeing a reliable and efficient supply of the highest quality. Fäth gas cabinets are specially designed for applications requiring the highest purity requirements, such as in the semiconductor or biotechnology industries. However, our cabinets are also ideally suitable for different areas, such as photovoltaics, pharmaceuticals and laboratories. As a professional supplier, we ensure the safe handling of hazardous, flammable, toxic and corrosive gases by adhering to strict safety guidelines and regulations.
Sicherheit
Der Gasflaschenanschluss sorgt durch einen 3-fach Anschlussblock und einer systemgesteuerten Spülprozedur für die größtmögliche Sicherheit des Operators beim Flaschenwechsel – bei gleichzeitig geringem Spülgasverbrauch.
Höchste Qualitätsstandards durch Gaswächter
Durch integrierte Gaswächter bieten wir Ihnen eine hoch genaue und umfassende Überwachung und somit den zuverlässigen Überblick bei Austritt von gefährlichen Spezialgasen. Potentielle Leckagen werden rechtzeitig erkannt und ihr Betrieb umfangreich vor Risiken geschützt.
Effiziente Abgasreinigung
Our prefabricated design for exhaust gas cleaning (absorber) ensures a compact, and simultaneously, a user-friendly exhaust gas cleaning. In addition, we offer you a fast and at the same time cost-effective installation.
Kontinuierliche Versorgung
Fäth Gasversorgungssysteme gewährleisten eine kontinuierliche Versorgung der Produktionsanlagen, ohne dass Gasflaschen ständig ausgetauscht oder aufgefüllt werden müssen.
Qualitätsstandards durch Flammenwächter
State-of-the-art flame detectors also provide you with a reliable protection against the risks by combustible gases.
Anpassbare Steuerprogramme
Our gas cabinets are obtainable in fully automatic, semi-automatic and manual systems.
Gas supply systems secure the supply in these industrial sectors
Gas supply systems are used in various industrial sectors, ensuring the supply of gases. Here are some areas where gas supply systems are commonly used:
Semiconductor industry
In semiconductor manufacturing, highly pure gases such as nitrogen, hydrogen, oxygen, and argon are required. Gas supply systems ensure that these gases are delivered to the various processes in controlled quantities and with high purity, for example, for etching, deposition, or cleaning of wafers.
Pharmaceutical industry
In pharmaceutical production, gases such as nitrogen, oxygen, carbon dioxide, and compressed air are used. Gas supply systems ensure the safe and reliable provision of these gases for various applications, such as the inerting of containers, packaging, or controlling chemical reactions.
Chemical industry
The chemical industry uses gases such as nitrogen, hydrogen, oxygen, argon, and others for various purposes, including reaction control, gas mixing, or the inertization of reaction vessels. Gas supply systems provide these gases in the required quantities and with the appropriate pressure and purity specifications.
Photovoltaic industry
Gas supply systems in the photovoltaic industry are specialized facilities that enable a controlled provision of gases for various production processes. These processes are crucial for the manufacturing of solar cells and modules. The gas supply systems ensure that gases are fed into the production facilities in the correct quantities, pressures, and intervals.
LED industry
Gas supply systems in the LED industry are specialized facilities that enable a controlled provision of gases for various LED manufacturing processes. These gases are crucial for epitaxy, doping, oxidation, and cleaning of semiconductor layers to produce high-quality LEDs. Gas supply systems ensure that the required gases are precisely dosed and introduced into the production process to ensure efficient and safe LED manufacturing.
Research and Development
Gas supply systems in research are specialized facilities that provide precise and controlled delivery of gases for various scientific experiments and investigations. They are used in fields such as chemistry, physics, materials science, environmental science, and biotechnology. These systems supply gases for chemical reactions, material synthesis, gas analysis, physical experiments, and other research applications. Accurate control of gas supply is crucial for achieving precise and reproducible research results. Safety in handling gases in research is a high priority, which is why high-quality gas supply systems and safety protocols are employed.
Gas cabinet
Fäth Group´s gas cabinet is a fully automatic supply system for emptying cylinders with liquefied and compressed gases. The redundant design allows a continuous gas flow and an automatic switching between the two supply lines. Continuous monitoring of all process-parameters guarantees the highest security of supply.
| Material | 316L stainless steel |
| Surface roughness | ≤ 0.25 Ra μm average |
| Helium leak test Leakage rate (within) | < 1 x 10-9 scc/s |
| Particle test | ≤ 0.1 μm size: 5 ptc/ft3 0.3 μm size: 0 ptc/ft3 |
| Humidity | < 10 ppb |
| Oxygen | < 10 ppb |
| Dimensions | W 800 x D 591x H 2280 (mm) |
Features
- VCR® joint / orbital welded
- Operation via touch panel Siemens TP900
- Exhaust gas monitoring
- Pre-filter and fine filter
- Assembly in clean room (ISO 6
- Service ports for maintenance and testing
Tests and qualification
The following tests were performed on the entire system:
- Pressure test
- Helium leak test
- Particle test (optional)
- Moisture test (optional)
- Oxygen test (optional)
Standards
- CE conformity
- TRGS (Technical Rules for Hazardous Substances)
- EIGA (European Industrial Gases Association)
- ATEX 2014/34/EU (optional)
- SEMI standards (optional)
Optional components
- Vacuum generator
- Height adjustable cylinder holder
- Cleaning cartridge
- Rupture disc
- Cylindrical scales for liquefied gases
- Flame detection
- Gas detection
- Cylinder, panel and process-line heating
More Interesting Topics
Gas support systems
Experience the innovative Gas Support Systems by Fäth Group for the industry, pharma & lab – perfectly adapted to your requirements.
Gas Distributors
Rely on forward-looking gas distribution systems: Consistent supply, highest safety standards and efficient use.
Extraction panels
Discover our robust gas sampling systems – ideal for all industries and labs! Maximum safety & efficiency guaranteed.